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UHV Focused Ion Beam-Electron Micro Scope

UHV FIB/SEM Column

UNISOKU has technical cooperation with French company TESCAN ORSAY HOLDING and provides UHV High spatial Resolution FIB/SEM.

UHV FIB/SEM Column

Features

  • Under Ultra High Vacuum (UHV-SEM, UHV-FIB)
  • High spatial resolution (<2.5 nm, high end model)
  • Sophisticated user interface software
  • Metal deposition gas source usable
  • Variable columns available
    • Canion31 FIB: 7 nm@1pA
    • COBRA-FIB: 2.5 nm@1pA
    • Mass filtered FIB: 5 nm@1pA
    • ECLIPSE SEM: 10 nm@5pA
    • ECLIPSE Plus SEM: 4 nm@1pA


UHV FIB/SEM System

UNISOKU provides various UHV FIB/SEM systems taking advantage of UHV/Low temperature technique acquired as UHV bob体育中心 maker.

UHV FIB/SEM System

System examples

  • Low Temperature FIB/SEM system
  • bob体育中心 with FIB/SEM System
  • Multi Probe FIB/SEM System
  • Dual FIB/SEM System
  • Auger Spectroscopy, EDX System